元素 | 材料名称 | 分子式 | CAS:No |
---|---|---|---|
Al | TMA | Al(CH3)3 | 75-24-1 |
TEA | Al(C2H5)3 | 97-93-8 | |
Al(MMP)3 | Al[CH3OCH2C(CH3)2O]3 | 478695-89-5 | |
DMAH | H(CH3)2Al | 885-37-2 | |
ASBO | Al[OCH(CH3)CH2CH3]3 | 2269-22-9 | |
B | TEB | B(OC2H5)3 | 150-46-9 |
TMB | B(OCH3) | 121-43-7 | |
TMAB | B[N(CH3)2]3 | 4375-83-1 | |
Ba | Ba(DPM)2 | Ba(C11H19O2)2 | 17594-47-7 |
Bi | Bi(CH3)3 | 593-91-9 | |
Ce | Ce(DPM)4 | Ce(C11H19O2)4 | 18960-54-8 |
Cl | CCl4 | 56-23-5 | |
C2H3Cl3 | 79-00-5 | ||
C2Cl4 | 127-18-4 | ||
Co | Co AMD | ||
Cu | Cu(DPM)3 | Cu(C11H19O2)2 | 14040-05-2 |
Cu(hfac)(TMVS) | C10H13CuF6O2 Si | 139566-53-3 |
元素 | 材料名称 | 分子式 | CAS:No |
---|---|---|---|
Ga | TEG | (C2H5)3Ga | 1115-99-7 |
TMG | (CH3)3Ga | 1445-79-0 | |
Ge | Ge(OC2H5)4 | 14165-55-0 | |
C4H12GeO4 | 992-91-6 | ||
Hf | TDMAH | Hf[N(CH3)2]4 | 19782-68-4 |
TEMAH | Hf[N(C2H5)CH3]4 | 352535-01-4 | |
C2H3Cl3 | 79-00-5 | ||
C2Cl4 | 127-18-4 | ||
I | IF5 | 7783-66-6 | |
In | In(acac)3 | In(C5H7O2)3 | 14405-45-9 |
TMI | (CH3)3In | 3385-78-2 | |
TEI | In(C2H5)3 | 923-34-2 | |
La | La(TMOD)3 | ||
Nb | PEN | Nb(OCH2CH3)5 | 3236-82-6 |
Ni | Ni AMD | ||
TDEAH | Hf[N(C2H5)2]4 | 19824-55-6 | |
HTB | Hf(OtC4H9)4 | 2172-02-3 |
元素 | 材料名称 | 分子式 | CAS:No |
---|---|---|---|
I | IF5 | 7783-66-6 | |
In | In(acac)3 | In(C5H7O2)3 | 14405-45-9 |
TMI | (CH3)3In | 3385-78-2 | |
TEI | In(C2H5)3 | 923-34-2 | |
La | La(TMOD)3 | ||
Nb | PEN | Nb(OCH2CH3)5 | 3236-82-6 |
Ni | Ni AMD | ||
P | TMOP | PO(OCH3)3 | 512-56-1 |
TEPO | PO(OC2H5)3 | 78-40-0 | |
TMP | P(CH3O)3 | 121-45-9 | |
Pb | Pb(DPM)2 | Pb(C11H19O2)2 | 21319-43-7 |
Pb(thd)2 | |||
Pb(TMOD)2 | |||
Pr | Pr(EtCp)3 | Pr(C5H4C2H5)3 | 108-88-3 |
Pr(DPM)3 | Pr(C11H19O2)3 | 15492-48-5 | |
Pt | C9H16Pt | 94442-22-5 | |
Ru | Ru(EtCp)2 | Ru(C2H5C5H4)2 | 32992-96-4 |
DER | Ru(C7H9)(C7H11) | 501652-75-1 | |
Pb | Pb(DPM)2 | Pb(C11H19O2)2 | 21319-43-7 |
Pb(thd)2 | |||
Pb(TMOD)2 | |||
Pr | Pr(EtCp)3 | Pr(C5H4C2H5)3 | 108-88-3 |
Pr(DPM)3 | Pr(C11H19O2)3 | 15492-48-5 | |
Pt | C9H16Pt | 94442-22-5 | |
Ru | Ru(EtCp)2 | Ru(C2H5C5H4)2 | 32992-96-4 |
元素 | 材料名称 | 分子式 | CAS:No |
---|---|---|---|
Si | TEOS | Si(OC2H5)4 | 78-10-4 |
SiCl4 | 10026-04-7 | ||
TCS | SiHCl3 | 10025-78-2 | |
TMOS | Si(OCH3)4 | 681-84-5 | |
HMDS | C6H19NSi2 | 999-97-3 | |
HMDSO | C6H18OSi2 | 107-46-0 | |
BTBAS | [(CH3)3CNH]2SiH2 | 186598-40-3 | |
DIBDMS | C10H24O2Si | 17980-32-4 | |
TMS | Si(CH3)4 | 75-76-3 | |
DEMS | C5H14O2Si | 2031-62-1 | |
C3H10Si | 993-07-7 | ||
CH3Cl3Si | 75-79-6 | ||
OMCTS、D4 | C8H24O4Si4 | 556-67-2 | |
TMCTS | C4H16O4Si4 | 2370-88-9 | |
TDMAS | SiH[N(CH3)2]3 | 15112-89-7 | |
TMDS | C4H15NSi2 | 15933-59-2 | |
C3H10O3Si | 2487-90-3 | ||
[(CH2=CH)(CH3)SiO]4 | 2554-06-5 | ||
VMDS | C5H12O2Si | 16753-62-1 | |
DMDES | (CH3)2Si(OC2H5)2 | 78-62-6 | |
DMPS | C8H12Si | 766-77-8 | |
(CH3)Si(OCH3)3 | 1185-55-3 | ||
C13H13F17O3Si | 83048-65-1 | ||
C14H32O3Si | 2943-75-1 | ||
C3H10O3Si | 2487-90-3 | ||
[(CH2=CH)(CH3)SiO]4 | 2554-06-5 | ||
VMDS | C5H12O2Si | 16753-62-1 | |
DMDES | (CH3)2Si(OC2H5)2 | 78-62-6 | |
DMPS | C8H12Si | 766-77-8 | |
(CH3)Si(OCH3)3 | 1185-55-3 | ||
C13H13F17O3Si | 83048-65-1 | ||
C14H32O3Si | 2943-75-1 |
元素 | 材料名称 | 分子式 | CAS:No |
---|---|---|---|
Sn | SnCl4 | 7646-78-8 | |
[CH3(CH2)3]4Sn | 1461-25-2 | ||
Sn(C9H16O2)2 | 22673-19-4 | ||
Sr | Sr(DPM)2 | Sr(C10H10F7O2)2 | 36885-30-0 |
280572-89-6 | |||
Ta | PET | Ta(OC2H5)5 | 6074-84-6 |
TBTEMT | Ta(NtC4H9)[N(C2H5)CH3]3 | 511292-99-2 | |
TBTDET | T-BuN=Ta(NEt2)3 | 169896-41-7 | |
Taimata | Ta[NC(CH3)2C2H5][N(CH3)2]3 | 440081-38-9 | |
PDMAT | C10H30N5Ta | ||
Ti | TiCl4 | 7550-45-0 | |
TTIP | Ti(i-OC3H7)4 | 546-68-9 | |
TDEAT | Ti[N(C2H5)2]4 | 4419-47-0 | |
TEMAT | Ti[N(CH3)C2H5]4 | 308103-54-0 | |
TDMAT | Ti[N(CH3)2]4 | 3275-24-9 | |
Ti(iPrO)2(DPM)2 | Ti(C11H19O2)2(O-i-C3H7)2 | 144665-26-9 | |
Ti(MMP)4 | |||
V | VCl4 | 7632-51-1 | |
V(NEtMe)4 | |||
Y | Y(DPM)3 | Y(C11H19O2)3 | 15632-39-0 |
Zn | DEZ | (C2H5)2Zn | 557-20-0 |
Zn(OD)2 | [CH3COCHCO(CH2)3CH3]2Zn | ||
Zr | TEMAZ | Zr[N(CH3)CH2CH3]4 | 175923-04-3 |
TDEAZ | Zr[N(C2H5)2]4 | 13801-49-5 | |
Zr(t-Obu)4 | Zr[OC(CH3)]4 | 2081-12-1 | |
(C5H5)Zr[N(CH3)2]3 | 33271-88-4 | ||
Zr(dmhd)4 | Zr(C18H30O4)2 | 69990-43-8 | |
Zr(DPM)4 | Zr(C11H19O2)4 | 18865-74-2 |